JPH01165643U - - Google Patents
Info
- Publication number
- JPH01165643U JPH01165643U JP6237888U JP6237888U JPH01165643U JP H01165643 U JPH01165643 U JP H01165643U JP 6237888 U JP6237888 U JP 6237888U JP 6237888 U JP6237888 U JP 6237888U JP H01165643 U JPH01165643 U JP H01165643U
- Authority
- JP
- Japan
- Prior art keywords
- inspection device
- view
- wafer
- semiconductor inspection
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6237888U JPH01165643U (en]) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6237888U JPH01165643U (en]) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165643U true JPH01165643U (en]) | 1989-11-20 |
Family
ID=31287995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6237888U Pending JPH01165643U (en]) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165643U (en]) |
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1988
- 1988-05-11 JP JP6237888U patent/JPH01165643U/ja active Pending